{
  "@context": {
    "@version": 1.1,
    "schema": "https://schema.org/",
    "mks": "https://www.mks.com/vocabulary#",
    "qudt": "http://qudt.org/schema/qudt/",
    "owl": "http://www.w3.org/2002/07/owl#",

    "MKSInstruments": {
      "@id": "schema:Organization",
      "@type": "@id"
    },
    "name": "schema:name",
    "url": {
      "@id": "schema:url",
      "@type": "@id"
    },
    "description": "schema:description",
    "industry": "schema:industry",
    "foundingDate": "schema:foundingDate",
    "legalName": "schema:legalName",
    "sameAs": {
      "@id": "schema:sameAs",
      "@type": "@id"
    },

    "Product": {
      "@id": "schema:Product",
      "@type": "@id"
    },
    "productCategory": "schema:category",
    "model": "schema:model",
    "manufacturer": {
      "@id": "schema:manufacturer",
      "@type": "@id"
    },

    "VacuumSystem": {
      "@id": "mks:VacuumSystem",
      "@type": "@id",
      "@context": {
        "pressureRange": "mks:pressureRange",
        "pumpType": "mks:pumpType",
        "chamberVolume": "mks:chamberVolume",
        "basePressure": "mks:basePressure"
      }
    },
    "GasDeliverySystem": {
      "@id": "mks:GasDeliverySystem",
      "@type": "@id",
      "@context": {
        "flowRate": "mks:flowRate",
        "gasSpecies": "mks:gasSpecies",
        "massFlowController": "mks:massFlowController",
        "pressureController": "mks:pressureController"
      }
    },
    "ProcessControl": {
      "@id": "mks:ProcessControl",
      "@type": "@id",
      "@context": {
        "setpoint": "mks:setpoint",
        "actualValue": "mks:actualValue",
        "controlLoop": "mks:controlLoop",
        "sensor": "mks:sensor"
      }
    },
    "LaserSystem": {
      "@id": "mks:LaserSystem",
      "@type": "@id",
      "@context": {
        "wavelength": "mks:wavelength",
        "pulseEnergy": "mks:pulseEnergy",
        "repetitionRate": "mks:repetitionRate",
        "beamQuality": "mks:beamQuality",
        "peakPower": "mks:peakPower"
      }
    },
    "MotionControl": {
      "@id": "mks:MotionControl",
      "@type": "@id",
      "@context": {
        "axis": "mks:axis",
        "positionAccuracy": "mks:positionAccuracy",
        "repeatability": "mks:repeatability",
        "speed": "mks:speed",
        "encoder": "mks:encoder"
      }
    },
    "Photonics": {
      "@id": "mks:Photonics",
      "@type": "@id",
      "@context": {
        "opticalComponent": "mks:opticalComponent",
        "transmittance": "mks:transmittance",
        "coatingType": "mks:coatingType",
        "aperture": "mks:aperture"
      }
    },
    "Measurement": {
      "@id": "qudt:Quantity",
      "@type": "@id",
      "@context": {
        "value": "qudt:value",
        "unit": {
          "@id": "qudt:unit",
          "@type": "@id"
        }
      }
    },
    "Instrument": {
      "@id": "schema:Product",
      "@type": "@id",
      "@context": {
        "serialNumber": "schema:serialNumber",
        "firmwareVersion": "mks:firmwareVersion",
        "calibrationDate": "mks:calibrationDate",
        "communicationInterface": "mks:communicationInterface"
      }
    }
  },
  "@type": "schema:Organization",
  "schema:name": "MKS Instruments",
  "schema:url": "https://www.mks.com/",
  "schema:description": "Global provider of foundational technology solutions for semiconductor manufacturing, electronics and packaging, and specialty industrial markets.",
  "schema:industry": [
    "Semiconductor Manufacturing",
    "Industrial Technology",
    "Instrumentation",
    "Photonics",
    "Vacuum Technology",
    "Process Control"
  ],
  "schema:sameAs": [
    "https://www.linkedin.com/company/mks-instruments",
    "https://ir.mks.com/"
  ]
}